Light-receiving device having light-trapping sheet

ABSTRACT

A light-receiving device of the present disclosure includes a light-trapping sheet, and a photoelectric conversion section optically coupled thereto. The light-trapping sheet includes: a light-transmitting sheet; and a plurality of light-coupling structures arranged in an inner portion of the light-transmitting sheet. The light-coupling structure includes first, second and third light-transmitting layers. A refractive index of the first and second light-transmitting layers is smaller than that of the light-transmitting sheet; and a refractive index of the third light-transmitting layer is larger than those of the first and second light-transmitting layers. The third light-transmitting layer has a diffraction grating parallel to the light-transmitting sheet. At least a part of the photoelectric conversion section is located along an outer edge of at least one of the surfaces of the light-transmitting sheet.

This is a continuation of International Application No.PCT/JP2012/007081, with an international filing date of Nov. 5, 2012,which claims priority of Japanese Patent Application No. 2011-244602,filed on Nov. 8, 2011, the contents of which are hereby incorporated byreference.

BACKGROUND

1. Technical Field

The present disclosure relates to a light-receiving device having alight-trapping sheet for allowing light-trapping utilizing diffraction.

2. Description of the Related Art

Where light is propagated between two light-propagating media ofdifferent refractive indices, since there is transmission and reflectionof light at the interface, it is typically difficult to transfer, with ahigh efficiency, light from one light-propagating medium to the otherlight-propagating medium and maintain this state. A conventional gratingcoupling method shown in “Optical Integrated Circuits”, p 94, p 243,Hiroshi Nishihara, et al. Ohmsha Ltd., for example, can be mentioned asa technique for taking light into a transparent sheet from anenvironmental medium such as the air. FIGS. 23A and 23B are diagramsillustrating the principle of the grating coupling method, showing across-sectional view and a plan view of a light-transmitting layer 20with a linear grating of a pitch Λ provided on a surface thereof. Asshown in FIG. 23A, if light 23 a of a wavelength λ is allowed to enterthe grating at a particular angle of incidence θ, it can be coupled toguided light 23B propagating inside the light-transmitting layer 20.

SUMMARY

However, according to the method disclosed in “Optical IntegratedCircuits”, p 94, p 243, Hiroshi Nishihara, et al. Ohmsha Ltd., onlylight that satisfies predetermined conditions can be taken into thelight-transmitting layer 20, and light that falls out of the conditionsis not taken in.

An embodiment of the present disclosure provides a light-receivingdevice having a light-trapping sheet.

In one general aspect, a light-receiving device of the presentdisclosure includes a light-trapping sheet, and a photoelectricconversion section optically coupled to the light-trapping sheet, thelight-trapping sheet including: a light-transmitting sheet having firstand second principal surfaces; and a plurality of light-couplingstructures arranged in an inner portion of the light-transmitting sheetat a first and second distance from the first and second principalsurfaces, respectively. Each of the plurality of light-couplingstructures includes a first light-transmitting layer, a secondlight-transmitting layer, and a third light-transmitting layersandwiched therebetween; and a refractive index of the first and secondlight-transmitting layers is smaller than a refractive index of thelight-transmitting sheet; a refractive index of the thirdlight-transmitting layer is larger than the refractive index of thefirst and second light-transmitting layers; and the thirdlight-transmitting layer has a diffraction grating parallel to the firstand second principal surfaces of the light-transmitting sheet. At leasta part of the photoelectric conversion section is located along an outeredge of at least one of the first and second principal surfaces of thelight-transmitting sheet.

According to an embodiment of the present disclosure, it is possible toefficiently perform photoelectric conversion of light that has beentaken in by utilizing total reflection of light.

Additional benefits and advantages of the disclosed embodiments will beapparent from the specification and Figures. The benefits and/oradvantages may be individually provided by the various embodiments andfeatures of the specification and drawings disclosure, and need not allbe provided in order to obtain one or more of the same.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A is a schematic cross-sectional view showing a first embodimentof a light-trapping sheet according to the present disclosure, and FIG.1B is a plan view showing the position of a fourth area in the firstembodiment.

FIGS. 2A and 2B are a schematic cross-sectional view and a plan viewshowing a light-coupling structure of the first embodiment, FIG. 2C is across-sectional view showing light being incident on an end face of thelight-coupling structure, FIG. 2D is a cross-sectional view showinglight being incident on the light-coupling structure with alight-transmitting layer 30 removed, and FIG. 2E is a cross-sectionalview showing another configuration example of a light-couplingstructure.

FIG. 3 is a cross-sectional view showing a structure used in analyzingthe light-trapping sheet of the first embodiment.

FIGS. 4A to 4D show results of an analysis conducted using the structureshown in FIG. 3, wherein FIG. 4A to FIG. 4C each show the relationshipbetween the angle of incidence of light and the transmittance thereofout of the sheet, and 4D shows the relationship between the groove depthof the diffraction grating and the light take-out efficiency out of thesheet.

FIG. 5A to 5E are diagrams showing light intensity distributions on thesheet cross section under conditions at positions indicated by arrows inFIGS. 4A to 4C.

FIGS. 6A to 6D show results of an analysis with the structure shown inFIG. 3 where the refractive index of a first light-transmitting layer 3a and a second light-transmitting layer 3 b is made equal to therefractive index of the light-transmitting sheet, and the refractiveindex of the third light-transmitting layer 3 c is set to 2.0, whereinFIG. 6A to 6C show the relationship between the angle of incidence andthe transmittance thereof out of the sheet, and D shows the relationshipbetween the groove depth of the diffraction grating and the lighttake-out efficiency out of the sheet.

FIGS. 7A to 7E are schematic cross-sectional views showing amanufacturing procedure of the light-trapping sheet of the firstembodiment.

FIGS. 8A and 8B are schematic plan views each showing a surface patternof a mold used in manufacturing the light-trapping sheet of the firstembodiment.

FIGS. 9A and 9B are a schematic cross-sectional view and a plan viewshowing a light-coupling structure used in a second embodiment of alight-trapping sheet according to the present disclosure.

FIG. 10 is a cross-sectional view showing a structure used in analyzingthe light-trapping sheet of the second embodiment.

FIGS. 11A to 11D show results of an analysis conducted using thestructure shown in FIG. 10, wherein FIGS. 11A to 11C show therelationship between the angle of incidence and the transmittance out ofthe sheet, and FIG. 11D shows the relationship between the groove depthof the diffraction grating and the light take-out efficiency out of thesheet.

FIGS. 12A to 12C show results of an analysis conducted using thestructures shown in FIGS. 3 and 10 where the position of the lightsource is shifted by 5 μm in the x-axis negative direction, whereinFIGS. 12A to 12C each show the relationship between the angle ofincidence of light on the end face of a single light-coupling structureand the transmittance thereof out of the sheet.

FIGS. 13A to 13E are schematic cross-sectional views showing amanufacturing procedure of the light-trapping sheet of the secondembodiment.

FIGS. 14A and 14B are a schematic cross-sectional view and a plan viewshowing a light-coupling structure used in a third embodiment of alight-trapping sheet according to the present disclosure.

FIG. 15 is a cross-sectional view showing a structure used in analyzingthe light-trapping sheet of the third embodiment.

FIGS. 16A to 16D show results of an analysis conducted using thestructure shown in FIG. 15, wherein FIGS. 16A to 16C each show therelationship between the angle of incidence and the transmittance out ofthe sheet, and FIG. 16D shows the relationship between the groove depthof the diffraction grating and the light take-out efficiency out of thesheet.

FIGS. 17A to 17C show results of an analysis conducted using thestructures shown in FIGS. 3 and 15 where the position of the lightsource is shifted by 5 μm in the x-axis negative direction, whereinFIGS. 17A to 17C show the relationship between the angle of incidence oflight on the end face of a single light-coupling structure and thetransmittance thereof out of the sheet.

FIGS. 18A to 18F are schematic cross-sectional views showing amanufacturing procedure of the light-trapping sheet of the thirdembodiment.

FIGS. 19A and 19B are schematic plan views each showing a surfacepattern of a mold used in manufacturing the light-trapping sheet of thethird embodiment.

FIG. 20A is a schematic cross-sectional view showing an embodiment of alight-receiving device according to the present disclosure, and FIGS.20B and 20C are diagrams each illustrating an arrangement of aphotoelectric conversion section.

FIG. 21 is a schematic cross-sectional view showing another embodimentof a light-receiving device according to the present disclosure.

FIG. 22 is a schematic cross-sectional view showing another embodimentof a light-receiving device according to the present disclosure.

FIGS. 23A and 23B are a cross-sectional view and a plan view of a lineargrating for taking in light by a grating coupling method, and FIGS. 23Cand 23D are diagrams showing the principle of the grating couplingmethod.

FIGS. 24A and 24B are schematic cross-sectional views showing stillother embodiments of the light-trapping sheet according to the presentdisclosure.

FIG. 25A is a cross-sectional view showing a variation of the presentembodiment, and FIGS. 25B and 25C are plan views showing variations.

DESCRIPTION OF EMBODIMENTS

First, thoughts by the present inventors on the problems withconventional techniques set forth above will be presented.

FIG. 23C shows a vector diagram of light incident on the gratingprovided on the light-transmitting layer 20. In FIG. 23C, circles 21 and22 are centered about point O, wherein the radius of the circle 21 isequal to the refractive index n₀ of an environmental medium 1surrounding the light-transmitting layer 20, and the radius of thecircle 22 is equal to the equivalent refractive index n_(eff) of theguided light 23B. The equivalent refractive index n_(eff) is dependenton the thickness of the light-transmitting layer 20, and takes aparticular value, depending on the waveguide mode, between therefractive index n₀ of an environmental medium 1 and the refractiveindex n₁ of the light-transmitting layer 20. FIG. 23D shows arelationship between the effective thickness t_(eff) and the equivalentrefractive index n_(eff) in a case where light propagates in the TE modethrough the light-transmitting layer 20. The effective thickness isequal to the thickness of the light-transmitting layer 20 where there isno grating, and if there is a grating, it is the thickness of thelight-transmitting layer 20 plus the average height of the grating.Induced guided light has modes such as zeroth, first, second, and soforth, which have different characteristic curves as shown in FIG. 23D.In FIG. 23C, point P is a point at which a line drawn from point O alongthe angle of incidence θ crosses the circle 21, point P′ is the foot ofa perpendicular from point P to the x axis, and points Q and Q′ arepoints at which the circle 22 crosses the x axis. The condition forlight coupling in the x-axis positive direction is represented by thelength of P′Q being equal to an integral multiple of λ/Λ, and thecondition for light coupling in the negative direction is represented bythe length P′Q′ being equal to an integral multiple of λ/Λ. Note howeverthat λ is the wavelength of light, and Λ is the pitch of the grating.That is, the condition for light coupling is represented by Expression1.

$\begin{matrix}{\left\lbrack {{Exp}.\mspace{14mu} 1} \right\rbrack\mspace{661mu}} & \; \\{{\sin\mspace{14mu}\theta} = {{\pm n_{eff}} + {q\frac{\lambda}{\Lambda}}}} & (1)\end{matrix}$where q is the diffraction order represented by an integer. At an angleof incidence other than 0 defined by Expression 1, light is not coupledinto the light-transmitting layer 20. Even with the same angle ofincidence θ, light is not coupled for different wavelengths.

Note that as shown in FIG. 23B, for light 23 aa incident on thelight-transmitting layer 20 at an azimuthal angle φ that is shifted byan angle φ from the direction of incidence of the light 23 a, theessential pitch of the grating of the light-transmitting layer 20 isΛ/cos φ. Therefore, for the light 23 a incident at a different azimuth,the condition for light coupling can be satisfied even with an angle ofincidence θ and a wavelength that are different from those defined byExpression 1. That is, where changes in the azimuth of light incident onthe light-transmitting layer 20 are tolerated, the condition for lightcoupling shown by Expression 1 is somewhat widened. However, incidentlight cannot be coupled to the guided light 23B over a wide wavelengthrange for every angle of incidence.

The guided light 23B, while propagating through the grating area,radiates light 23 b′ in the same direction as reflected light of theincident light 23 a. Therefore, even if light is incident at a positionfar away from an end portion 20 a of the grating and propagates throughthe light-transmitting layer 20 as the guided light 23B, it attenuatesby the time it reaches the end portion 20 a of the grating. Therefore,only the light 23 a that is incident at a position close to the endportion 20 a of the grating can propagate through the light-transmittinglayer 20 as the guided light 23B without being attenuated by theradiation. That is, even if the area of the grating is increased inorder to couple a large amount of light, it is not possible to allow allthe light incident on the grating to propagate as the guided light 23B.

With a light-receiving device according to an embodiment of the presentdisclosure, as opposed to the conventional technique described above,light incident on the light-transmitting sheet enters a light-couplingstructure arranged in an inner portion thereof, and is converted by thediffraction grating of the third light-transmitting layer in thelight-coupling structure to light that propagates in the direction alongthe third light-transmitting layer to be radiated from the end face ofthe light-coupling structure. Since the light-coupling structure is insuch a positional relationship that it is parallel to thelight-transmitting sheet surface, and light that is radiated from thelight-coupling structure is repeatedly totally reflected between thesurface of the light-transmitting sheet, and surfaces of otherlight-coupling structures, to be confined within the light-transmittingsheet. Since at least a part of a photoelectric conversion section islocated along an outer edge of at least one of the first and secondprincipal surfaces of the light-transmitting sheet, it is possible toefficiently perform photoelectric conversion of light that has beentaken in.

A light-receiving device of the present disclosure includes alight-trapping sheet, and a photoelectric conversion section opticallycoupled to the light-trapping sheet. Now, before describing embodimentsof the light-receiving device in detail, the light-trapping sheet willbe first described in detail.

First Embodiment

A first embodiment of a light-trapping sheet according to the presentdisclosure will be described. FIG. 1A is a schematic cross-sectionalview of a light-trapping sheet 51. The light-trapping sheet 51 includesa light-transmitting sheet 2 having a first principal surface 2 p and asecond principal surface 2 q, and a plurality of light-couplingstructure 3 provided in the light-transmitting sheet 2.

The light-transmitting sheet 2 is formed by a transparent material thattransmits light of a desired wavelength or within a desired wavelengthrange determined according to the application. For example, it is formedby a material that transmits visible light (wavelength: 0.4 μm or moreand 0.7 μm or less). The thickness of the light-transmitting sheet 2 isabout 0.03 mm to 1 mm, for example. There is no particular limitation onthe size of the first principal surface 2 p and the second principalsurface 2 q, and they each have an area determined according to theapplication.

A cover sheet 2 e is bonded on the light-transmitting sheet 2 with aspacer 2 d sandwiched therebetween. Therefore, most of the firstprincipal surface 2 p of the light-transmitting sheet 2 is in contactwith a buffer layer 2 f. The spacer 2 d is formed by a material having alower refractive index than the light-transmitting sheet, such as anaerogel. Note that the cover sheet 2 e may be formed on the secondprincipal surface 2 q of the light-transmitting sheet 2 or on bothsurfaces. The thickness of the cover sheet 2 e is about 0.1 mm to 1.0mm, for example.

As shown in FIG. 1A, the light-coupling structures 3 are arranged in aninner portion of the light-transmitting sheet 2 at a first distance d1or more and a second distance d2 or more from the first principalsurface 2 p and the second principal surface 2 q, respectively.Therefore, in the light-transmitting sheet 2, the light-couplingstructure 3 is not provided in a first area 2 a that is in contact withthe first principal surface 2 p and has a thickness of the firstdistance d1, and in a second area 2 b that is in contact with the secondprincipal surface 2 q and has a thickness of the second distance d2, andthe light-coupling structure 3 is provided in a third area 2 csandwiched between the first area 2 a and the second area 2 b.

The light-coupling structures 3 are three-dimensionally arranged in thethird area 2 c of the light-transmitting sheet 2. Preferably, thelight-coupling structures 3 are two-dimensionally arranged on a surfaceparallel to the first principal surface 2 p and the second principalsurface 2 q, and a plurality of sets of the two-dimensionally-arrangedlight-coupling structures 3 are layered together in the thicknessdirection of the light-transmitting sheet 2. Herein, “parallel” does notneed to be mathematically strictly parallel. The term “parallel” as usedin the present specification is meant to include cases where thedirection is inclined by 10 degrees or less with respect to the strictlyparallel direction.

The light-coupling structures 3 are arranged with a predetermineddensity in the x,y-axis direction (in-plane direction) and the z-axisdirection (thickness direction). For example, the density is 10 to 10³per 1 mm in the x-axis direction, 10 to 10³ per 1 mm in the y-axisdirection, and about 10 to 10³ per 1 mm in the z-axis direction. Inorder to efficiently take in light illuminating the entirety of thefirst principal surface 2 p and the second principal surface 2 q of thelight-transmitting sheet 2, the density with which the light-couplingstructures 3 are arranged in the x-axis direction of thelight-transmitting sheet 2, that in the y-axis direction and that in thez-axis direction may be independent of one another and uniform. Notehowever that depending on the application or the distribution of lightilluminating the first principal surface 2 p and the second principalsurface 2 q of the light-transmitting sheet 2, the arrangement of thelight-coupling structures 3 in the light-transmitting sheet 2 may not beuniform and may have a predetermined distribution.

FIGS. 2A and 2B are a cross-sectional view along the thickness directionof the light-coupling structure 3, and a plan view orthogonal thereto.The light-coupling structure 3 includes the first light-transmittinglayer 3 a, the second light-transmitting layer 3 b, and the thirdlight-transmitting layer 3 c sandwiched therebetween. That is, the firstlight-transmitting layer 3 a, the second light-transmitting layer 3 band the third light-transmitting layer 3 c sandwiched therebetween arearranged next to each other in a direction perpendicular to the firstand second principal surfaces. Herein, “perpendicular” does not need tobe mathematically strictly perpendicular. The term “perpendicular” asused in the present specification is meant to include cases where thedirection is inclined by 10 degrees or less with respect to the strictlyperpendicular direction. The third light-transmitting layer 3 c includesa diffraction grating 3 d having a linear grating of the pitch Λprovided on the reference plane. The linear grating of the diffractiongrating 3 d may be formed by protrusions/depressions provided at theinterface between the third light-transmitting layer 3 c and the firstlight-transmitting layer 3 a or the second light-transmitting layer 3 b,or may be provided inside the third light-transmitting layer 3 c asshown in FIG. 2E. It may be a grating based on refractive indexdifferences, instead of a grating with protrusions/depressions. In thelight-coupling structure 3, the diffraction grating 3 d of the thirdlight-transmitting layer 3 c is arranged in the light-transmitting sheet2 so as to be parallel to the first principal surface 2 p and the secondprincipal surface 2 q of the light-trapping sheet 51. Herein, thediffraction grating being parallel to the first principal surface 2 pand the second principal surface 2 q means that the reference plane onwhich the grating is provided is parallel to the first principal surface2 p and the second principal surface 2 q.

In one embodiment, where a plurality of light-coupling structures 3 arearranged on a surface parallel to the first principal surface 2 p andthe second principal surface 2 q, they are arranged so that at least thefirst light-transmitting layer 3 a and the second light-transmittinglayer 3 b are spaced apart from each other. That is, where a pluralityof light-coupling structures 3 include a first light-coupling structureand a second light-coupling structure that are two-dimensionallyarranged next to each other on a surface parallel to the first andsecond principal surfaces (2 p, 2 q), the first and/or secondlight-transmitting layer (3 a, 3 b) of the first light-couplingstructure is/are spaced apart from the first and/or secondlight-transmitting layer (3 a, 3 b) of the second light-couplingstructure. Herein, the first and/or second light-transmitting layer (3a, 3 b) of first light-coupling structure being spaced apart from thefirst and/or second light-transmitting layer (3 a, 3 b) of the secondlight-coupling structure means to include any of the following cases.That is, a case where the first light-transmitting layer 3 a of thefirst light-coupling structure and the first light-transmitting layer 3a of the second light-coupling structure are spaced apart from eachother; a case where the second light-transmitting layer 3 b of the firstlight-coupling structure and the second light-transmitting layer 3 b ofthe second light-coupling structure are spaced apart from each other;and a case where the first and second light-transmitting layers (3 a, 3b) of the first light-coupling structure and the first and secondlight-transmitting layers (3 a, 3 b) of the second light-couplingstructure are spaced apart from each other. The third light-transmittinglayers 3 c may be arranged to be spaced apart from each other, or may bearranged to be continuous with each other. In order to facilitate themanufacturing process, the third light-transmitting layers 3 c may bearranged to be continuous with each other. That is, the thirdlight-transmitting layer of the first light-coupling structure and thethird light-transmitting layer of the second light-coupling structuremay be continuous with each other.

Where a plurality of light-coupling structures 3 are arranged in thethickness direction of the light-transmitting sheet 2, they are arrangedto be spaced apart from each other. For example, where the secondlight-transmitting layer of the second light-coupling structure ispresent above the first light-transmitting layer of the firstlight-coupling structure, the first light-transmitting layer of thefirst light-coupling structure and the second light-transmitting layerof the second light-coupling structure are arranged to be spaced apartfrom each other.

The thicknesses of the first light-transmitting layer 3 a, the secondlight-transmitting layer 3 b and the third light-transmitting layer 3 care a, b and t, respectively, and the step (depth) of the lineardiffraction grating of the third light-transmitting layer 3 c is d. Thesurface of the third light-transmitting layer 3 c is parallel to thefirst principal surface 2 p and the second principal surface 2 q of thelight-transmitting sheet 2, and surfaces 3 p and 3 q of the firstlight-transmitting layer 3 a and the second light-transmitting layer 3 bthat are located on the opposite side from the third light-transmittinglayer 3 c are also parallel to the first principal surface 2 p and thesecond principal surface 2 q of the light-transmitting sheet 2.

As will be described below, in order to be able to take in light ofdifferent wavelengths incident on the light-trapping sheet, thelight-trapping sheet 51 may include a plurality of light-couplingstructures 3, and at least two of the plurality of light-couplingstructures may differ from each other in terms of the direction in whichthe diffraction grating 3 d extends. Alternatively, at least two of theplurality of light-coupling structures 3 may differ from each other interms of the pitch Λ of the diffraction grating 3 d. Alternatively, acombination thereof may be used.

The refractive index of the first light-transmitting layer 3 a and thesecond light-transmitting layer 3 b is smaller than the refractive indexof the light-transmitting sheet 2, and the refractive index of the thirdlight-transmitting layer 3 c is larger than the refractive index of thefirst light-transmitting layer 3 a and the second light-transmittinglayer 3 b. Hereinbelow, it is assumed that the first light-transmittinglayer 3 a and the second light-transmitting layer 3 b are the air, andthe refractive index thereof is 1. It is also assumed that the thirdlight-transmitting layer 3 c is formed by the same medium as thelight-transmitting sheet 2, and they have an equal refractive index.

The surfaces 3 p and 3 q of the first light-transmitting layer 3 a andthe second light-transmitting layer 3 b of the light-coupling structure3 are each a rectangular of which two sides are the lengths W and L, forexample, and W and L are 3 μm or more and 100 μm or less. That is, thesurfaces of the first light-transmitting layer 3 a and the secondlight-transmitting layer 3 b of the light-coupling structure 3 are eachsized so as to circumscribe a circle having a diameter of 3 μm or moreand 100 μm or less. The thickness (a+t+d+b) of the light-couplingstructure 3 is 3 μm or less. While the surface (plane) of thelight-coupling structure 3 has a rectangular shape as shown in FIG. 2Bin the present embodiment, it may have a different shape, e.g., apolygonal shape, a circular shape, or an elliptical shape.

The light-trapping sheet 51 is used while being surrounded by anenvironmental medium. For example, the light-trapping sheet 51 is usedin the air. In this case, the refractive index of the environmentalmedium is 1. Hereinbelow, the refractive index of the light-transmittingsheet 2 is assumed to be n_(s). Light 4 from the environmental mediumpasses through the cover sheet 2 e and the buffer layer 2 f, and entersthe inside of the light-transmitting sheet 2 through the first principalsurface 2 p and the second principal surface 2 q of thelight-transmitting sheet 2. The buffer layer 2 f is formed by the samemedium as the environmental medium, and the refractive index thereofis 1. The refractive index of the spacer 2 d is substantially equalto 1. An AR coat or anti-reflective nanostructures may be formed on theopposite surfaces of the cover sheet 2 e, the first principal surface 2p and the second principal surface 2 q in order to increase thetransmittance of the incident light 4. The anti-reflectivenanostructures include minute protrusion/depression (or diffraction)structures, such as moth-eye structures, whose pitch and height are ⅓ orless the design wavelength. The design wavelength is the wavelength oflight used when designing the various elements so that thelight-trapping sheet 51 exhibits a predetermined function. Note thatwith anti-reflective nanostructures, Fresnel reflection is reduced buttotal reflection is present.

Hereinbelow, of the light present inside the light-transmitting sheet 2,light that satisfies sin θ<1/n_(s) will be referred to as thein-critical-angle light and light that satisfies sin θ≧1/n_(s) as theout-of-critical-angle light, regarding the angle θ (hereinafter referredto as the propagation angle) formed between the propagation azimuththereof and the normal to the light-transmitting sheet 2 (a lineperpendicular to the first principal surface 2 p and the secondprincipal surface 2 q). In FIG. 1A, where in-critical-angle light 5 a ispresent inside the light-transmitting sheet 2, a portion thereof isconverted by a light-coupling structure 3 to out-of-critical-angle light5 b, and this light is totally reflected by the first principal surface2 p to be out-of-critical-angle light 5 c that stays inside the sheet. Aportion of the remaining in-critical-angle light 5 a′ of thein-critical-angle light 5 a is converted by another light-couplingstructure 3 to out-of-critical-angle light 5 b′, and this light isreflected by the second principal surface 2 q to beout-of-critical-angle light 5 c′ that stays inside the sheet. Thus, allof the in-critical-angle light 5 a is converted to theout-of-critical-angle light 5 b or 5 b′ inside the third area 2 c wherethe light-coupling structures 3 are arranged.

On the other hand, where out-of-critical-angle light 6 a is present inthe light-transmitting sheet 2, a portion thereof is totally reflectedby the surface of a light-coupling structure 3 to beout-of-critical-angle light 6 b, and this light is totally reflected bythe first principal surface 2 p to be out-of-critical-angle light 6 cthat stays inside the sheet. A portion of the remaining light of thelight 6 a becomes out-of-critical-angle light 6 b′ that passes throughthe third area 2 c where the light-coupling structures 3 are provided,and this light is totally reflected by the second principal surface 2 qto be out-of-critical-angle light 6 c′ that stays inside thelight-transmitting sheet 2. Although not shown in the figure, there isalso out-of-critical-angle light that stays inside the sheet while beingtotally reflected between different light-coupling structures 3 andbetween the first principal surface 2 p and the second principal surface2 q, i.e., light that propagates through, while staying in, the firstarea 2 a, the second area 2 b or the third area 2 c. In this case, theremay occur a deviation in the distribution of light propagating throughthe first area 2 a and the second area 2 b. Where the deviation in thedistribution of light in the light-transmitting sheet 2 is problematic,one or more fourth area 2 h may be provided, in the third area 2 c inthe light-transmitting sheet 2, where no light-coupling structure 3 isprovided, as shown in FIG. 1A. That is, the light-coupling structures 3are arranged only in the third area 2 c excluding the fourth area 2 h.In the light-transmitting sheet 2, the fourth area 2 h connects betweenthe first area 2 a and the second area 2 b. The fourth area 2 h extendsfrom the first area 2 a to the second area 2 b, or in the oppositedirection, and the azimuth of an arbitrary straight line passing throughthe fourth area 2 h is along a larger angle than a critical angle thatis defined by the refractive index of the light-transmitting sheet andthe refractive index of the environmental medium around thelight-transmitting sheet. That is, assuming that the refractive index ofthe environmental medium is 1 and the refractive index of thelight-transmitting sheet 2 is n_(e), the angle θ′ of the direction 2 hxin which the arbitrary straight line passing through the fourth area 2 hextends with respect to the normal to the light-transmitting sheet 2satisfies sin θ′≧1/n_(s). Herein, a straight line passing through thefourth area 2 h refers to the straight line penetrating the surface atwhich the fourth area 2 h is in contact with the first area 2 a and thesurface at which the fourth area 2 h is in contact with the second area2 b.

FIG. 1B is a plan view of the light-trapping sheet 51, showing thearrangement of the fourth areas 2 h. Preferably, a plurality of fourthareas 2 h are provided in the light-transmitting sheet 2 as shown inFIG. 1B. Since the fourth area 2 h extends from the first area 2 a tothe second area 2 b, or in the opposite direction, at an angle largerthan the critical angle, only out-of-critical-angle light, of the lightpropagating through the first area 2 a and the second area 2 b of thelight-transmitting sheet 2, can pass from the first area 2 a to thesecond area 2 b, or in the opposite direction, passing through thefourth area 2 h. Therefore, it is possible to prevent the deviation ofthe light distribution in the light-trapping sheet 51.

As shown in FIG. 2A, the in-critical-angle light 5 a passes through thesurface 3 q of the second light-transmitting layer 3 b, and a portionthereof is converted by the function of the diffraction grating 3 d toguided light 5B that propagates inside the third light-transmittinglayer 3 c. The remainder primarily becomes the in-critical-angle light 5a′ to pass through the light-coupling structure 3 as transmitted lightor diffracted light, or becomes in-critical-angle light 5 r to passthrough the light-coupling structure 3 as reflected light. Upon enteringthe second light-transmitting layer 3 b, there is also theout-of-critical-angle light 6 b which is reflected by the surface 3 q,but most of the light can be allowed to pass therethrough ifanti-reflective nanostructures are formed on the surfaces 3 q and 3 p.

The coupling to the guided light 5B is the same as the principle of theconventional grating coupling method. Before the guided light 5B reachesan end face 3S of the third light-transmitting layer 3 c, a portionthereof is radiated in the same direction as the in-critical-angle light5 r to be in-critical-angle light 5 r′, and the remainder is guided tobe radiated from the end face 3S of the third light-transmitting layer 3c to be the out-of-critical-angle light 5 c. On the other hand, theout-of-critical-angle light 6 a is totally reflected at the surface 3 qof the second light-transmitting layer 3 b, and it entirely becomes theout-of-critical-angle light 6 b. Thus, out-of-critical-angle lightincident on the surface of the light-coupling structure (the surface 3 pof the first light-transmitting layer 3 a and the surface 3 q of thesecond light-transmitting layer 3 b) is reflected, as it is, asout-of-critical-angle light, while a portion of in-critical-angle lightis converted to out-of-critical-angle light.

Note that if the length of the diffraction grating 3 d of the thirdlight-transmitting layer 3 c is too long, the guided light 5B isentirely radiated before reaching the end face 3S. If it is too short,the efficiency of coupling to the guided light 5B is insufficient. Howeasily the guided light 5B is radiated is represented by the radiationloss coefficient α, and the intensity of the guided light 5B ismultiplied by a factor of exp(−2αL) at a propagation distance of L.Assuming that the value of α is 10 (1/mm), the light intensity will bemultiplied by a factor of 0.8 after propagation over 10 μm. Theradiation loss coefficient α is related to the depth d of thediffraction grating 3 d, and it monotonously increases in the range ofd≦d_(c) while being saturated in the range of d>d_(c). Where thewavelength of light is λ, the equivalent refractive index of the guidedlight 5B is n_(eff), the refractive index of the light-transmittinglayer 3 c is n₁, and the duty of the diffraction grating 3 d (the ratioof the width of the protruding portion with respect to the pitch) is0.5, d_(c) is give by Expression 2 below.

$\begin{matrix}{\left\lbrack {{Exp}.\mspace{14mu} 2} \right\rbrack\mspace{661mu}} & \; \\{d_{c} \approx {\frac{\lambda}{2\pi}\sqrt{n_{eff}^{2} - \left( \frac{n_{1} - 1}{2} \right)^{2}}}} & (2)\end{matrix}$

For example, d_(c)=0.107 μm if λ=0.55 μm, n_(eff)=1.25, and n₁=1.5. Inthe monotonous increase region, the radiation loss coefficient α is inproportion to d squared. Therefore, the length of the diffractiongrating 3 d, i.e., the length of the third light-transmitting layer 3 c(the dimensions W and L) is determined by the radiation loss coefficientα, and is dependent on the depth d of the diffraction grating 3 d.Assuming that by adjusting the depth d, the value of α is set in therange of 2 to 100 (1/mm) and the attenuation ratio to 0.5, W and L willbe about 3 μm to 170 μm. Therefore, if W and L are 3 μm or more and 100μm or less, as described above, it is possible to suppress the radiationloss to obtain a high coupling efficiency by adjusting the depth d.

Table 1 shows the visible light wavelength (λ=0.4 to 0.7 μm) of lightthat is coupled for the pitch Λ and the angle of incidence θ based onExpression 1, where the equivalent refractive index n_(eff) of theguided light 5B is set to 1.25. Each section of a dotted line is therange for coupling. For example, where the pitch is 0.4 μm, light havinga wavelength of 0.4 μm is coupled at θ=−14° and light having awavelength of 0.7 μm is coupled at θ=30°, thereby giving a visible lightcoupling range from θ=−14° to θ=30°.

TABLE 1 Angle of incidence θ (degrees) −90 −54 −33 −14 0 5 30 49 90Pitch 0.18 0.4 Λ 0.20 0.4----0.5 (μm) 0.30 0.4----------------------0.70.40 0.4------------------0.7 0.56 0.4----------0.7 1.60 0.4----0.7 2.800.7

The polarity of the angle of incidence θ is relevant to the lightcoupling direction. Therefore, if one focuses only on thepresence/absence of coupling while ignoring the light couplingdirection, covering either the range of angles of incidence from 0 to90° or from −90 to 0° means that coupling is achieved for every angle ofincidence. Therefore, it can be seen from Table 1 that in order forlight to be coupled for every visible light wavelength and for everyangle of incidence, one may combine together light-coupling structures 3including diffraction gratings 3 d having pitches Λ from 0.18 μm to 0.56μm (from 0° to 90°), or from 0.30 μm to 2.80 μm (from −90° to 0°).Taking into consideration changes in the equivalent refractive index andmanufacturing errors occurring when forming the waveguide layer and thediffraction grating, the pitch of the diffraction grating 3 d may begenerally 0.1 μm or more and 3 μm or less.

For example, as shown in FIG. 28, the pitch of the diffraction grating 3d is Λ for the in-critical-angle light 5 a that is incident in thedirection perpendicular to the direction in which the diffractiongrating 3 d extends, but the effective pitch of the diffraction grating3 d for light 5 aa that is incident at an azimuthal angle of φ is Λ/cosφ. For example, where the azimuthal angle φ of incidence of the light 5aa is 0 to 87°, the effective pitch is Λ to 19Λ. Therefore, where Λ=0.18μm is set, it is possible to realize effective pitches Λ from 0.18 to2.80 μm depending on the azimuth of incident light even with the samediffraction grating 3 d, and where Λ=0.30 μm is set, it is possible torealize pitches Λ from 0.30 to 2.80 μm. Therefore, it is possible totake in light for every visible light wavelength and for every angle ofincidence also by placing light-coupling structures 3 of a single pitchin the light-transmitting sheet 2 while turning the light-couplingstructures 3 so that the direction in which the diffraction gratingextends (the azimuth of the diffraction grating) varies from 0° to 180°,other than by combining together light-coupling structures 3 includingdiffraction gratings 3 d having different pitches. Moreover, for aplurality of light-coupling structures 3, the pitch of the diffractiongrating 3 d and the direction in which the diffraction grating 3 dextends may both be varied.

Next, light at end faces 3 r and 3 s perpendicular to the surfaces 3 pand 3 q of the light-coupling structure 3 (surfaces extending along thenormal direction to the light-transmitting layer 3 b) will be discussed.As shown in FIG. 2C, possible courses of action for the light incidenton the end face 3 r of the light-coupling structure 3 are: to bereflected by the end face 3 r; to be diffracted through the end face 3r; to be refracted passing through the end face 3 r; and to be guidedthrough the third light-transmitting layer 3 c passing through the endface 3 r. For example, the out-of-critical-angle light 6 a which isincident on, and passes through, the end faces of the firstlight-transmitting layer 3 a and the second light-transmitting layer 3 bis refracted to be in-critical-angle light 6 a′. A portion of light 6Awhich is incident on, and passes through, the end face of the thirdlight-transmitting layer 3 c is converted to guided light 6B whichpropagates inside the third light-transmitting layer 3 c.

For reference, FIG. 2D shows the optical path obtained when the thirdlight-transmitting layer 3 c is removed from the light-couplingstructure 3 and the space left by the removal is filled with the sameair as the first light-transmitting layer 3 a and the secondlight-transmitting layer 3 b. When the in-critical-angle light 5 a isincident on the surface 3 q of the light-coupling structure 3, if theposition of incidence is close to the end face 3 s, it is output throughthe end face 3 s as the out-of-critical-angle light 5 a′ as a result ofrefraction. When the in-critical-angle light 5 a is incident on the endface 3 r of the light-coupling structure 3, it is totally reflected bythe end face 3 r. When the out-of-critical-angle light 6 a is incidenton the end face 3 r of the light-coupling structure 3, it is output fromthe surface 3 p as the in-critical-angle light 6 a′ as a result ofrefraction, irrespective of the position of incidence. When theout-of-critical-angle light 6 a is incident on the surface 3 q of thelight-coupling structure 3, it is totally reflected by the surface 3 q.

Thus, for light that is incident on the end faces 3 r and 3 s of thelight-coupling structure 3, the behavior is complicated, and even ifout-of-critical-angle light is incident on the end face, it is notalways output as out-of-critical-angle light. However, if the size ofthe surface (W, L) is set to be sufficiently (e.g., 4 times or more)larger than the size of the end face (a+t+d+b), the influence at the endface will be sufficiently small, and then the transmission or thereflection of light at the surfaces 3 p and 3 q can be seen as thetransmission or reflection behavior of light for the entirelight-coupling structure 3. Specifically, if the size of the surface 3 pof the first light-transmitting layer 3 a and the surface 3 q of thesecond light-transmitting layer 3 b is 4 times or more of the thicknessof the light-coupling structure 3, it is possible to sufficiently ignorethe influence of light at the end faces 3 r and 3 s of thelight-coupling structure 3. Therefore, the light-coupling structures 3exhibit a function of irreversibly converting in-critical-angle light toout-of-critical-angle light while maintaining out-of-critical-anglelight as out-of-critical-angle light, and if the density of thelight-coupling structures 3 is set to a sufficient density, it ispossible to convert all the light incident on the light-trapping sheet51 to out-of-critical-angle light (i.e., light confined within thesheet).

FIG. 3 shows a cross-sectional structure of a light-trapping sheet usedin an analysis for confirming the light-confining effect of thelight-trapping sheet 51. A light-trapping sheet including onelight-coupling structure was used for the analysis. As shown in FIG. 3,a light source S (indicated by a broken line) having a width of 5 μm wasset in parallel at a position of 1.7 μm from the second principalsurface 2 q of the light-transmitting sheet 2, and the secondlight-transmitting layer 3 b having a width of 6 μm was arranged inparallel thereabove at a distance of 0.5 μm, with the thirdlight-transmitting layer 3 c and the first light-transmitting layer 3 aof the same width being arranged thereabove. The first principal surface2 p of the light-transmitting sheet 2 is located at a position of 2.5 μmfrom the surface of the first light-transmitting layer 3 a. Thepositions of the first light-transmitting layer 3 a, the secondlight-transmitting layer 3 b and the third light-transmitting layer 3 care shifted side to side based on the angle θ so that a plane wavehaving a polarization at an angle of 45° with respect to the drawingsheet is output from the light source S at an azimuth forming the angleof θ with respect to the normal to the second principal surface 2 q, andthe center of the incident light passes through the center of thesurface of the second light-transmitting layer 3 b. The thickness a ofthe first light-transmitting layer 3 a was set to 0.3 μm, the thicknessc of the second light-transmitting layer 3 b to 0.3 μm, the thickness tof the third light-transmitting layer 3 c to 0.4 μm, the depth d of thediffraction grating to 0.18 μm, and the pitch Λ of the diffractiongrating to 0.36 μm. The refractive index of the light-transmitting sheet2 and the third light-transmitting layer 3 c was assumed to be 1.5, andthe refractive index of the environmental medium, the firstlight-transmitting layer 3 a and the second light-transmitting layer 3 bto be 1.0.

FIGS. 4A to 4C are results of an analysis using a light-trapping sheethaving the structure shown in FIG. 3, each showing the relationshipbetween the angle of incidence θ of light from the light source Sincident on the light-coupling structure 3 and the transmittance oflight that is output to the outside of the light-trapping sheet. Thestructure used in the analysis was as described above. A two-dimensionalfinite-difference time-domain method (FDTD) was used in the analysis.Therefore, the analysis results are those with a structure in which thecross section shown in FIG. 3 extends infinitely in the directionperpendicular to the drawings sheet. The transmittance was measuredwhile it was stable, and was defined by the ratio of the integratedvalue of the Poynting vectors passing through the bottom surface (z=0μm) and the top surface (z≈8 μm) of the analysis area with respect tothe integrated value of the Poynting vectors passing through a closedcurved surface surrounding the light source. While there are somecalculation results exceeding 100%, it is because of slight errors inthe measurement of the Poynting vectors of the light source. FIG. 4Ashows the calculation results for a case where the wavelength λ of thelight source is 0.45 μm, FIG. 4B for a case where the wavelength λ is0.55 μm, and FIG. 4C for a case where the wavelength λ is 0.65 μm. Eachfigure uses the depth d of the diffraction grating as a parameter, andis also plotting the results obtained under a condition where there isno light-coupling structure 3 (a configuration only with thelight-transmitting sheet 2 and the light source S).

A comparison between the results obtained in a case where thelight-coupling structures 3 are present but the depth d of thediffraction grating is d=0 and the results (Nothing) obtained in a casewhere there is no light-coupling structure shows that the former has alower transmittance than the latter in a range within the critical angle(41.8°), and they are both substantially zero for angles greater than orequal to that. The reason why the former has a lower transmittancewithin the critical angle is because light incident on the surface 3 qof the second light-transmitting layer 3 b is refracted and a portionthereof is output from the end face 3 s as out-of-critical-angle light,as described above with reference to FIG. 2D. Note however that for theformer, out-of-critical-angle light entering through the end face 3 r ofthe light-coupling structure 3 is refracted through this surface, and isthen refracted through the surface 3 p of the first light-transmittinglayer 3 a to be in-critical-angle light inside the light-transmittingsheet 2, as described above again with reference to FIGS. 2C and 2D.Therefore, for a structure where d=0, there is conversion toout-of-critical-angle light while there is also conversion toin-critical-angle light, and it can be said that the light-confiningeffect as a whole is small.

On the other hand, a comparison between the results for a case where thedepth of the grating is d=0.18 μm and the results for a case where d=0shows that although the transmittance of the former is substantiallyclose to that of the latter, the transmittance drops at positionsindicated by arrows a, b, c, d and e. FIG. 4D shows the standard value(a value obtained by division by 90) of a value obtained by integratingeach of the curves of FIGS. 4A, 4B and 4C for the angle of incidence θ,using the depth d of the diffraction grating as a parameter. Since theanalysis model is two-dimensional, the integrated value is equal to theefficiency with which light in the light-confining sheet is taken out ofthe sheet. With any wavelength, the take-out efficiency decreases as dincreases (at least for the comparison between d=0 and d=0.18). Thisrepresents the light-confining effect by a single light-couplingstructure. This effect can be accumulated, and by increasing the numberof light-coupling structures, it is possible to eventually confine allthe light. Note that while this analysis is a two-dimensional model,there is always incident light that satisfies Expression 1, which is thecoupling condition, for an arbitrary azimuthal angle φ shown in the planview of FIG. 2A in an actual model (three-dimensional model), andtherefore the transmittance curves shown in FIGS. 4A to 4D will drop forthe entire range of the angle of incidence θ, rather than for the localrange such as the arrows a, b, c, d and e, thus increasing thelight-confining effect of the light-coupling structures.

FIGS. 5A to 5E show light intensity distribution diagrams in thelight-trapping sheet under conditions indicated by arrows a, b, c, d ande of FIGS. 4A to 4D. Specifically, FIG. 5A shows the results where thewavelength is λ=0.45 μm and θ=5°, FIG. 5B shows the results where thewavelength is λ=0.55 μm and θ=0°, FIG. 5C shows the results where thewavelength is λ=0.55 μm and θ=10°, FIG. 5D shows the results where thewavelength is λ=0.65 μm and θ=10°, and FIG. 5E shows the results wherethe wavelength is λ=0.65 μm and θ=20°.

For the conditions and the angles of incidence shown in FIGS. 5A and 5B,since the refractive index of the third light-transmitting layer 3 c ishigher than the refractive index of the first light-transmitting layer 3a and the second light-transmitting layer 3 b surrounding the thirdlight-transmitting layer 3 c, the third light-transmitting layer 3 cfunctions as a waveguide layer, and the incident light is coupled to theguided light propagating inside the third light-transmitting layer 3 cby the function of the diffraction grating, with the light beingradiated into the light-transmitting sheet 2 from the end faces 3 r and3 s of the third light-transmitting layer 3 c. The radiated light isout-of-critical-angle light, and is totally reflected by the firstprincipal surface 2 p and the second principal surface 2 q of thelight-transmitting sheet 2 to be confined within the light-transmittingsheet 2. Also for the conditions and the angles of incidence shown inFIGS. 5C, 5D and 5E, the incident light is coupled to the guided lightpropagating inside the third light-transmitting layer 3 c by thefunction of the diffraction grating, with the light being radiated intothe sheet from the end face 3 r of the third light-transmitting layer 3c. The radiated light is out-of-critical-angle light, and is totallyreflected by the first principal surface 2 p and the second principalsurface 2 q of the light-transmitting sheet 2 to be confined within thelight-transmitting sheet 2. Note that in FIGS. 5A, 5C and 5E, theradiated light is divided into two, and the coupled light is guidedlight of the first-order mode whose phase is reversed above and belowthe cross section of the waveguide layer. On the other hand, in FIGS. 5Band 5D, the radiated light is in an undivided state, and the coupledlight is guided light of the zeroth-order mode.

FIGS. 6A to 6D show results of an analysis using the structure shown inFIG. 3 where the refractive index of the first light-transmitting layer3 a and the second light-transmitting layer 3 b is made to coincide withthe refractive index of the light-transmitting sheet 2, and therefractive index of the third light-transmitting layer 3 c is changed to2.0. The other conditions are the same as those when the analysisresults shown in FIGS. 4A to 4D were obtained. FIG. 6A shows the resultswhere the wavelength of the light source is λ=0.45 μm, FIG. 6B shows theresults where the wavelength is λ=0.55 μm, and FIG. 6C shows the resultswhere the wavelength is λ=0.65 μm. A comparison between the resultswhere the depth of the grating is d=0.18 μm and the results where d=0shows that the transmittance of the former drops at positions of arrowsa, b, c, d, e and f, as compared with that of the latter. This is forthe same reason as described above with reference to FIGS. 4A to 4D.However, in the region above the critical angle, the latter comes to thevicinity of zero whereas the former is substantially floating. This isbecause light of an angle of incidence above the critical anglediffracts through the diffraction grating of the light-couplingstructure 3, and a portion thereof is converted to in-critical-anglelight in the sheet. FIG. 6D shows the standard value (a value obtainedby division by 90) of a value obtained by integrating each of the curvesof FIGS. 6A, 6B and 6C for the angle of incidence θ, using the groovedepth d as a parameter. For some conditions, an increase in d ratherincreased the take-out efficiency, thereby failing to obtain thelight-confining effect. This indicates that the characteristics in theregion above the critical angle cancel out the effects at the positionsof the arrows a, b, c, d, e and f.

A comparison between analysis results of FIGS. 4 and 6 shows that thetransmittance is successfully made zero above the critical angle inFIGS. 4A to 4D. A comparison between the results where the depth of thegrating is d=0.18 μm and the results where d=0 shows there is nodifference in the region above the critical angle, and they are bothsubstantially zero. This is because the refractive index of the firstlight-transmitting layer 3 a and the second light-transmitting layer 3 bis set to be smaller than the refractive index of the light-transmittingsheet 2, resulting in total reflection at the surface 3 q which is theinterface between the second light-transmitting layer 3 b and thelight-transmitting sheet 2, whereby light of a large angle of incidencecannot enter the diffraction grating in the light-coupling structure 3,and there is no diffracted light caused by the diffraction grating.Thus, it can be seen that with the light-coupling structure 3, in orderfor the third light-transmitting layer 3 c to be a light guide layer,the refractive index thereof may be larger than the refractive index ofthe first light-transmitting layer 3 a and the second light-transmittinglayer 3 b, and in order for out-of-critical-angle light not to enter thethird light-transmitting layer 3 c, the refractive index of the firstlight-transmitting layer 3 a and the second light-transmitting layer 3 bmay be smaller than the refractive index of the light-transmitting sheet2. It can also be seen that in order to decrease the critical angle forthe total reflection between the light-transmitting sheet 2 and thelight-coupling structure, the difference between the refractive index ofthe first light-transmitting layer 3 a and the second light-transmittinglayer 3 b and the refractive index of the light-transmitting sheet ispreferably large, and the refractive index of the firstlight-transmitting layer 3 a and the second light-transmitting layer 3 bmay be 1, for example.

Thus, with the light-trapping sheet of the present embodiment, lightincident on the first principal surface and the second principal surfaceof the light-transmitting sheet at various angles becomesin-critical-angle light and enters a light-coupling structure arrangedinside the light-transmitting sheet, and a portion thereof is convertedby the diffraction grating in the light-coupling structure to guidedlight that propagates inside the third light-transmitting layer and isradiated from the end face of the light-coupling structure to beout-of-critical-angle light. Because the pitch of the diffractiongrating varies and the azimuth of the diffraction grating varies fromone light-coupling structure to another, this conversion is achieved forevery azimuth over a wide wavelength range, e.g., over the entirevisible light range. Since the length of the diffraction grating isshort, it is possible to reduce the radiation loss of the guided light.Therefore, in-critical-angle light present inside the light-transmittingsheet is all converted to out-of-critical-angle light by a plurality oflight-coupling structures. Since the refractive index of the first andsecond transmission layers of the light-coupling structure is smallerthan the refractive index of the light-transmitting sheet, theout-of-critical-angle light is totally reflected by the surface of thelight-coupling structure, and the light is repeatedly totally reflectedbetween the surfaces of other light-coupling structures and the surfaceof the light-transmitting sheet, thus being confined within thelight-transmitting sheet. Thus, the light-coupling structureirreversibly converts in-critical-angle light to out-of-critical-anglelight, while maintaining out-of-critical-angle light in theout-of-critical-angle state. Therefore, if the density of thelight-coupling structures is set to a sufficient density, it is possibleto convert all the light incident on the light-trapping sheet toout-of-critical-angle light, i.e., light confined within the sheet.

Note that in FIG. 1A, the first principal surface 2 p of thelight-transmitting sheet 2 is covered by the cover sheet 2 e via thebuffer layer 2 f therebetween. Therefore, a foreign matter 2 g such as adrop of water remains on the surface of the cover sheet 2 e, and isprevented from coming into contact with the first principal surface 2 p.If the foreign matter 2 g comes into contact with the first principalsurface 2 p, the total reflection relationship at the contact surface islost, whereby the out-of-critical-angle light, which has been confinedwithin the light-transmitting sheet 2, leaks to the outside via theforeign matter 2 g. Although the spacer 2 d is also in contact with thefirst principal surface 2 p, the refractive index thereof issubstantially the same as the refractive index of the environmentalmedium, the total reflection relationship at the contact surface ismaintained, and the out-of-critical-angle light will not leak to theoutside via the spacer 2 d. If the surface area of thelight-transmitting sheet is small, the buffer layer 2 f may be arrangedbetween the cover sheet 2 e and the first principal surface 2 p, insteadof providing the spacer 2 d sandwiched therebetween.

FIGS. 24A and 24B are cross-sectional views each showing an examplearrangement of cover sheets 2 e. In the example of FIG. 24A, coversheets 2 e are provided so as to oppose the first principal surface 2 pand the second principal surface 2 q of the light-transmitting sheet 2both with a “gap” interposed therebetween. In this example, the firstprincipal surface 2 p and the second principal surface are entirelycovered by the cover sheets 2 e. In the example of FIG. 24B, a portionof the first principal surface 2 p of the light-transmitting sheet 2 isnot opposing the cover sheet 2 e. Also in this example, a spacer 2 d isprovided at a position other than the end portions of the secondprincipal surface 2 q. Note that the “gap” described above may be filledwith a fluid or a solid whose refractive index is sufficiently small.

The light-trapping sheet 51 can be manufactured by the following method,for example. FIGS. 7A to 7E are schematic cross-sectional configurationviews showing a manufacturing procedure of the light-trapping sheet 51,and FIGS. 8A and 8B are schematic plan views each showing a pattern of amold surface for producing the sheet.

In FIGS. 8A and 8B, rectangular minute structures 25A and 25B of thesame size are two-dimensionally arranged, for example, on the surfacesof molds 25 a and 25 b. The arrangement of the minute structures 25A onthe mold 25 a and the arrangement of the minute structures 25B on themold 25 b are equal. In the present embodiment, the minute structures25A and 25B are protrusions. The height of the minute structures 25A isthe dimension b of FIG. 2A, and the height of the minute structures 25Bis equivalent to the dimension a. While the surface of the minutestructure 25B is a plane, a linear diffraction grating having a heightof d and a pitch of Λ is formed on the surface of the minute structure25A, and the azimuth of the diffraction grating (the direction in whichthe depressed portion or the protruding portion extends) varies from oneminute structure 25A to another. While gratings of azimuths of 45°intervals, i.e., 0°, 45°, 90° and 135°, are arranged regularly in FIGS.8A and 8B, gratings may be arranged in practice with an equal frequencyat azimuths of smaller intervals, e.g., 30° or 15°.

As shown in FIG. 7A, with a thin layer of a spacer agent applied on thesurface of the mold 25 b, a transparent resin sheet 24 is laid on thesurface of the mold 25 b, and the mold 25 a is arranged on the sheet,pressing the resin sheet 24 sandwiched between the mold 25 b and themold 25 b while the minute structures 25B and the minute structures 25Aare aligned with each other.

As shown in FIG. 7B, the mold 25 a is lifted, thereby peeling the resinsheet 24 off the mold 25 b, and the resin sheet 24 is pressed against aresin sheet 24 a with a thin layer of an adhesive applied on the surfacethereof as shown in FIG. 7C, thereby bonding together the resin sheet 24and the resin sheet 24 a. As shown in FIG. 7D, an adhesive is applied ina thin layer on the bottom surface of the resin sheet 24 a, and it ispressed against similarly-formed resin sheets 24′ and 24′a whileignoring the alignment therebetween, thus bonding them together.

As shown in FIG. 7E, the mold 25 a is lifted while the resin sheet 24′ais secured, thereby peeling the resin sheets 24, 24 a, 24′ and 24′a as awhole off the mold 25 a.

Thereafter, the resin sheets 24, 24 a, 24′ and 24′a are replaced by theresin sheets 24′ and 24′a of FIG. 7D, and these steps are repeated,thereby producing the third area 2 c of the light-transmitting sheet 2shown in FIG. 1A. Resin sheets to be the first area 2 a and the secondarea 2 b of the light-transmitting sheet 2 are bonded to the frontsurface and the reverse surface of the third area 2 c of thelight-transmitting sheet 2, thereby completing the light-trapping sheet51 shown in FIG. 1A. While an adhesive is used for the bonding betweenresin sheets in the present embodiment, the surfaces of the resin sheetsmay be heated so as to weld together the resin sheets, instead of usingan adhesive. Anti-reflective nanostructures may be formed in advance onthe surface of the resin sheet 24 a and the resin sheets to be the firstarea 2 a and the second area 2 b.

Second Embodiment

A second embodiment of a light-trapping sheet according to the presentdisclosure will be described. A light-trapping sheet 52 of the presentembodiment is different from the light-coupling structure of the firstembodiment in terms of the structure at the end face of thelight-coupling structure. Therefore, the description hereinbelow willfocus on the light-coupling structure of the present embodiment.

FIGS. 9A and 9B schematically show a cross-sectional structure and aplanar structure of a light-coupling structure 3′ along the thicknessdirection of the light-trapping sheet 52. As shown in FIGS. 9A and 9B, adepressed portion 3 t having a depth of e is provided on the end faces 3r and 3 s of the light-coupling structure 3′. The cross section of thedepressed portion 3 t has a width that is tapered inwardly. Therefore,in the light-coupling structure 3′, the thickness of the firstlight-transmitting layer 3 a and that of the second light-transmittinglayer 3 b decrease toward the outer edge side away from the center ofthe light-coupling structure 3′. The surfaces 3 p and 3 q are flat asthey are in the first embodiment.

FIG. 10 shows a cross-sectional structure of a light-trapping sheet usedin an analysis for confirming the light-confining effect of thelight-trapping sheet 52 including the light-coupling structure 3′. Thelight-coupling structure and the light source are arranged at just thesame positions as the corresponding elements in the structure used inthe analysis in the first embodiment (FIG. 3).

FIGS. 11A to 11C show results of an analysis using a light-trappingsheet having the structure shown in FIG. 10, each showing therelationship between the angle of incidence θ of light from the lightsource S incident on the light-coupling structure 3′ and thetransmittance of light that is output to the outside of thelight-trapping sheet. The same method as that of the first embodimentwas used for the analysis. FIG. 11A shows the results where thewavelength of the light source is λ=0.45 μm, FIG. 11B shows the resultswhere the wavelength is λ=0.55 μm, and FIG. 11C shows the results wherethe wavelength is λ=0.65 μm. Each figure uses the depth d of thediffraction grating as a parameter, and is also plotting the resultsobtained under a condition where there is no light-coupling structure (aconfiguration only with the light-transmitting sheet 2 and the lightsource S).

A comparison between the results obtained in a case where thelight-coupling structures 3′ are present but the depth of thediffraction grating is d=0 and the results (Nothing) obtained in a casewhere there is no light-coupling structure shows that the former issmaller than the latter in a range within the critical angle (41.8°),and they are both zero for angles greater than or equal to that. Thereason why the former is smaller within the critical angle is becauselight incident on the surface 3 q of the second light-transmitting layer3 b is refracted and a portion thereof is output from the right sideface (the right side face of the third light-transmitting layer 3 c) asout-of-critical-angle light, as described above with reference to FIG.2D.

On the other hand, a comparison between the results for a case where thedepth of the grating is d=0.18 μm and the results for a case where d=0shows that although the transmittance of the former is substantiallyclose to that of the latter, the transmittance drops at positionsindicated by arrows a, b, c, d and e. These positions correspond toconditions under which light is coupled to the guided light. FIG. 11Dshows the standard value (a value obtained by division by 90) of a valueobtained by integrating each of the curves of FIGS. 11A, 11B and 11C forthe angle of incidence θ, using the groove depth d as a parameter. Sincethe analysis model is two-dimensional, the integrated value is equal tothe efficiency with which light in the sheet is taken out of the sheet.With any wavelength, the take-out efficiency decreases as d increases(at least for the comparison between d=0 and d=0.18). This representsthe light-confining effect by a single light-coupling structure, as withthe analysis results in the first embodiment. This effect can beaccumulated, and by increasing the number of light-coupling structures,it is possible to confine all the light. Note that while this analysisis a two-dimensional model, there is always incident light thatsatisfies Expression 1, which is the coupling condition, for anarbitrary azimuthal angle φ shown in the plan view of FIG. 2A in anactual three-dimensional model, and therefore the transmittance curvesshown in FIGS. 11A to 11D will drop for the entire range of the angle ofincidence 8, rather than for the local range such as the arrows a, b, c,d and e, thus increasing the light-confining effect of thelight-coupling structures. The drops at positions of arrows b, c, d ande are smaller as compared with those of the analysis results of thefirst embodiment because the length of the grating (coupling length) ismade smaller in the analysis model of this embodiment.

FIGS. 12A to 12C show results of an analysis of the second embodiment,each showing the relationship between the angle of incidence θ of lighton the end face of a single light-coupling structure and thetransmittance thereof out of the light-trapping sheet. In the analysisconditions used, only the position of the light source S is shifted by 5μm in the x-axis negative direction from the conditions of FIG. 10 orFIG. 3. FIG. 12A shows a case where the wavelength of the light sourceis λ=0.45 μm, FIG. 12B a case where the wavelength is λ=0.55 μm, andFIG. 12C a case where the wavelength is λ=0.65 μm, wherein each figureshows a comparison between the model of this embodiment and the model ofthe first embodiment, and is also plotting the results obtained under acondition where there is no light-coupling structure (a configurationonly with the light-transmitting sheet 2 and the light source S).

A comparison between the results for the model of the second embodimentand the results (Nothing) obtained in a case where there is nolight-coupling structure shows that they substantially coincide witheach other in both cases within the critical angle (41.8° or less), butthe latter is substantially zero and the former substantially floatsfrom zero outside the critical angle (41.8° or more). The former floatsoutside the critical angle because, as described above with reference toFIGS. 2C and 2D, light incident on the end face of the firstlight-transmitting layer 3 a and the second light-transmitting layer 3 bof the light-coupling structure refracts, and then becomesin-critical-angle light and is output from the first principal surface 2p. In contrast, in the analysis results for the model of the secondembodiment, the floating outside the critical angle is partiallysuppressed. This is because the first light-transmitting layer 3 a andthe second light-transmitting layer 3 b account for no area on the endface of the second embodiment, and the refraction at the end face issomewhat suppressed. Therefore, the second embodiment is a configurationsuch that the influence at the end face (the phenomenon thatout-of-critical-angle light is converted to in-critical-angle light) canbe ignored more than in the first embodiment, and can be said to be aconfiguration having a greater light-confining effect. Note that inFIGS. 12A to 12C, the length of the light source is set to 5 μm.Increasing this length will increase the proportion of a component thatthat deviates from the end face of the light-coupling structure and isincident directly on the first principal surface 2 p to be totallyreflected or is totally reflected at the surface 3 q of thelight-coupling structure, thus reducing the floating outside thecritical angle. If the length of the light source is set to 20 μm, whichis 4 times more, while the light-coupling structure is set to be about21 μm, only the floating outside the critical angle, of the end faceincidence characteristics, is reduced to about ¼.

FIGS. 13A to 13E are schematic cross-sectional views showing an exampleof a production procedure for the light-trapping sheet 52 of the presentembodiment. The light-trapping sheet 52 can be manufactured by using asimilar procedure to that of the first embodiment, while providingslopes 25A′ and 25B′ at the outer edge portions of the minute structures25A and 25B of the molds 25 a and 25 b. Except for the shapes of themolds 25 a and 25 b being different, the light-trapping sheet 52 of thepresent embodiment can be manufactured in a similar manner to thelight-trapping sheet 51 of the first embodiment, and therefore themanufacturing procedure will not be described in detail.

Third Embodiment

A third embodiment of a light-trapping sheet according to the presentdisclosure will be described. A light-trapping sheet 53 of the presentembodiment is different from the light-coupling structure of the secondembodiment in terms of the structure at the end face of thelight-coupling structure. Therefore, the description hereinbelow willfocus on the light-coupling structure of the present embodiment.

FIGS. 14A and 14B schematically show a cross-sectional structure and aplanar structure of a light-coupling structure 3″ along the thicknessdirection of the light-trapping sheet 53. As shown in FIGS. 14A and 14B,on the surfaces 3 p and 3 q of the light-coupling structure 3″, taperedportions 3 u and 3 v are provided across areas having the width eadjacent to the end faces 3 r and 3 s. Therefore, the thicknesses of thefirst light-transmitting layer 3 a and the second light-transmittinglayer 3 b are decreased toward the outer edge side away from the centerof the light-coupling structure 3″ while maintaining the flatness of theinterface between the first light-transmitting layer 3 a and the secondlight-transmitting layer 3 b and the third light-transmitting layer 3 c.

FIG. 15 shows a cross-sectional structure of a light-trapping sheet usedin the analysis for confirming the light-confining effect of thelight-trapping sheet 53 including the light-coupling structure 3″. Thelight-coupling structure and the light source are provided at just thesame positions as those in the structure used in the analysis in thefirst embodiment (FIG. 3).

FIGS. 16A to 16C show results of an analysis using a light-trappingsheet having the structure shown in FIG. 15, each showing therelationship between the angle of incidence θ of light from the lightsource S incident on the side of the light-coupling structure 3′ and thetransmittance of light that is output to the outside of thelight-trapping sheet. The same method as that of the first embodimentwas used for the analysis. FIG. 16A is for a case where the wavelengthof the light source is λ=0.45 μm, FIG. 16B for a case where thewavelength is λ=0.55 μm, and FIG. 16C for a case where the wavelength isλ=0.65 μm, wherein each figure uses the depth d of the diffractiongrating as a parameter, and is also plotting the results obtained undera condition where there is no light-coupling structure (a configurationonly with the light-transmitting sheet 2 and the light source S).

A comparison between the results obtained in a case where thelight-coupling structures are present but the depth of the grating isd=0 and the results (Nothing) obtained in a case where there is nolight-coupling structure shows that the former is smaller than thelatter in a range within the critical angle (41.8°), and the latter iszero for angles greater than or equal to the critical angle, whereasfloating remains for the former in the range up to 55°. The reason whythe former is smaller within the critical angle is because lightincident on the surface 3 q of the second light-transmitting layer 3 bis refracted and a portion thereof is output from the right side face(the right side face of the third light-transmitting layer 3 c) asout-of-critical-angle light, as described above with reference to FIG.2D. There are two possible reasons for the former to float for anglesgreater than or equal to the critical angle. First, the surface 3 q ofthe second light-transmitting layer 3 b is sloped toward the outer edgeportion, whereby a portion of light exceeding the critical angle can beincident on the surface 3 q of the second light-transmitting layer 3 bwithin the critical angle, and this light diffracts through the gratinginside the light-coupling structure to be in-critical-angle light.Second, the thickness of the second light-transmitting layer 3 b is toosmall in the outer edge portion, and a portion of light exceeding thecritical angle passes into the inside of the light-coupling structure inthe form of evanescent light, and this light diffracts through thegrating to be in-critical-angle light.

On the other hand, a comparison between the results for a case where thedepth of the diffraction grating is d=0.18 μm and the results for a casewhere d=0 shows that although the transmittance of the former issubstantially close to that of the latter, the transmittance drops atpositions of arrows a, b, c, d and e. These positions correspond toconditions under which light is coupled to the guided light, and thelight is guided, after which it is radiated from the end face of thethird light-transmitting layer 3 c to be out-of-critical-angle light.This radiated light falls within the range of about ±35° about apropagation angle of 90° (x-axis direction) (see FIG. 5).

In FIGS. 16A to 16D, the floating of transmitted light is suppressed atthe angle of incidence of 55° or more, and it becomes substantiallyzero, indicating that light to be guided light and radiated becomesout-of-critical-angle light (light whose propagation angle is 55° ormore) that is repeatedly totally reflected and stays inside the sheet.Note that as the surface 3 p of the first light-transmitting layer 3 aand the surface 3 q of the second light-transmitting layer 3 b aresloped toward the outer edge portion, the propagation angle of lightthat is totally reflected at these surfaces increases and decreasesdepending on the slope direction, but since they occur with the sameprobability, it is possible to maintain substantially the samepropagation angle as a whole.

FIG. 16D shows the standard value (a value obtained by division by 90)of a value obtained by integrating each of the curves of FIGS. 16A, 16Band 16C for the angle of incidence θ, using the groove depth d as aparameter. Since the analysis model is two-dimensional, the integratedvalue is equal to the efficiency with which light in the sheet is takenout the sheet. With any wavelength, the take-out efficiency decreases asd increases (at least for the comparison between d=0 and d=0.18). Thisrepresents the light-confining effect by a single light-couplingstructure, as with the analysis results of the first embodiment. Thiseffect can be accumulated, and by increasing the number oflight-coupling structures, it is possible to confine all the light. Notethat while this analysis is a two-dimensional model, there is alwaysincident light that satisfies Expression 1, which is the couplingcondition, for an arbitrary azimuthal angle φ shown in the plan view ofFIG. 2A in an actual three-dimensional model, and therefore thetransmittance curves shown in FIGS. 16A to 16D will drop for the entirerange of the angle of incidence θ, rather than for the local range suchas the arrows a, b, c, d and e, thus increasing the light-confiningeffect of the light-coupling structures.

FIGS. 17A to 17C show results of an analysis using the sheet of thethird embodiment, each showing the relationship between the angle ofincidence e of light on the end face of a single light-couplingstructure and the transmittance thereof out of the light-trapping sheet.In the analysis conditions used, only the position of the light source Sis shifted by 5 μm in the x-axis negative direction from the conditionsof FIG. 15 or FIG. 3. FIG. 17A shows a case where the wavelength of thelight source is λ=0.45 μm, FIG. 178 a case where the wavelength isλ=0.55 μm, and FIG. 17C a case where the wavelength is λ=0.65 μm,wherein each figure shows a comparison between the model of thisembodiment and the model of Embodiment 1, and is also plotting theresults obtained under a condition where there is no light-couplingstructure (a configuration only with the light-transmitting sheet 2 andthe light source S). A comparison between the results for the model ofEmbodiment 1 and the results (Nothing) obtained in a case where there isno light-coupling structure shows that they substantially coincide witheach other in both cases within the critical angle (41.8° or less), butthe latter is substantially zero and the former substantially floatsoutside the critical angle (41.8° or more). The former floats outsidethe critical angle because, as described above with reference to FIGS.2C and 2D, light incident on the end face of the firstlight-transmitting layer 3 a and the second light-transmitting layer 3 bof the light-coupling structure refracts, and then becomesin-critical-angle light and is output from the upper surface. Incontrast, with the results for the model of the third embodiment, thefloating is significantly suppressed to substantially zero in the rangewhere the angle of incidence is 55° or more. This is because the firstlight-transmitting layer 3 a and the second light-transmitting layer 3 baccount for no area on the end face of the third embodiment, and acomponent that is supposed to refract through the end face is totallyreflected at the sloped surface 3 q of the second light-transmittinglayer 3 b. Therefore, the third embodiment is a configuration such thatthe influence at the end face (the phenomenon that out-of-critical-anglelight is converted to in-critical-angle light) can be ignored more thanin the first embodiment or the second embodiment, and can be said to bea configuration having a greater light-confining effect.

The light-trapping sheet 53 can be manufactured by the following method,for example. FIGS. 18A to 18F are schematic cross-sectionalconfiguration views showing a manufacturing procedure of thelight-trapping sheet 53, and FIGS. 8A and 8B are schematic plan viewseach showing a pattern of a mold surface for producing the sheet. InFIG. 19A, the surface of the mold 25 a is a plane, and rectangularminute structures 25A of the same size are two-dimensionally arranged,for example, on the surface of the mold 25 a. The rectangular minutestructure 25A is a diffraction grating having a height of d and a pitchof Λ. The azimuth of the diffraction grating varies from one minutestructure 25A to another. While diffraction gratings of 45°-intervalazimuths, i.e., 0°, 45°, 90° and 135°, are arranged regularly in FIG.19A, gratings may be arranged in practice with an equal frequency atsmaller azimuths intervals, e.g., 30° or 15°. The rectangular minutestructures 25B and 25B′ are two-dimensionally arranged also on thesurfaces of the molds 25 b and 25 b′ of FIG. 19B. The pitch of thearrangement of the minute structures 25B and 25B′ is equal to the pitchof the arrangement of the minute structures 25A. The minute structures25B and 25B′ are depressed portions with planar bottoms. The depth ofthe depressed portion is equivalent to the dimension a or b of FIGS. 14Aand 14B. The minute structures 25A of the mold 25 a are so large thattheir square shapes are almost in contact with one another (they may bein contact with one another), the minute structures 25B and 25B′ of themolds 25 b and 25 b′ are smaller.

As shown in FIG. 18A, the transparent resin sheet 24 is laid on a mold25 c having a flat surface and, with a thin layer of a spacer agentapplied thereon, is pressed by the mold 25 a. As shown in FIG. 18B, themold 25 a is lifted to peel the mold 25 a off the resin sheet, and theflat resin sheet 24 a is laid on the resin sheet 24, onto which adiffraction grating has been transferred.

As shown in FIG. 18C, the resin sheet 24 and the resin sheet 24 a arepressed by the mold 25 b while being heated, and the resin sheet 24 a israised in the area of a depression 25B of the mold 25 b while attachingthe resin sheet 24 and the resin sheet 24 a together in the other area.In this process, the diffraction grating is all buried to disappear inthe attached portion, and remains only in the area where the resin sheet24 a is raised. Raising the resin sheet 24 a forms an air layer (or avacuum layer) between the resin sheet 24 a and the resin sheet 24. Asshown in FIG. 18D, the mold 25 c is lifted to peel the mold 25 c off theresin sheet 24, and a resin sheet 24 a′ is laid under the resin sheet24. As shown in FIG. 18E, the resin sheet 24 and the resin sheet 24 a′are pressed by a mold 25 b′ while being heated, and the resin sheet 24a′ is raised in the area of a depression 25B′ of the mold 25 b′ whileattaching the resin sheet 24 and the resin sheet 24 a′ together in theother area. The rise of the resin sheet 24 a′ forms an air layer (or avacuum layer) between the resin sheet 24 a′ and the resin sheet 24. Asshown in FIG. 18F, the molds 25 b and 25 b′ are peeled off, completingan attached sheet of the resin sheet 24 a, the resin sheet 24 and theresin sheet 24 a′. Thereafter, these attached sheets are bonded togethervia an adhesive layer therebetween, and the process is repeated, therebyproducing the third area 2 c of the light-transmitting sheet 2 shown inFIG. 1A. A resin sheet to be the first area 2 a and the second area 2 bof the light-transmitting sheet 2 is bonded to the front surface and thereverse surface of the third area 2 c of the light-transmitting sheet 2,thereby completing the light-trapping sheet 53. Note thatanti-reflective nanostructures may be formed in advance on the surfaceof the resin sheet to be the resin sheets 24 a and 24 a′, the first area2 a and the second area 2 b.

In embodiments hereinbelow, descriptions with respect to the coversheets 2 e will, be omitted because they are the same as, and redundantwith, those given in the first embodiment.

Fourth Embodiment

An embodiment of a light-receiving device according to the presentdisclosure will be described. FIG. 20A schematically shows across-sectional structure of a light-receiving device 54 of the presentembodiment. The light-receiving device 54 includes the light-trappingsheet 51 of the first embodiment and a photoelectric conversion section7. The light-trapping sheet 52 of the second embodiment or thelight-trapping sheet 53 of the third embodiment may be used instead ofthe light-trapping sheet 51.

A reflective film 11 is preferably provided on end faces 2 s and 2 r ofthe light-trapping sheet 51. The photoelectric conversion section 7 isprovided adjacent to the second principal surface 2 q of thelight-trapping sheet 51. If the light-transmitting sheet 2 has aplurality of end faces, the reflective film 11 may be provided on all ofthe end faces. In the present embodiment, a portion of the secondprincipal surface 2 q and a light-receiving portion of the photoelectricconversion section 7 are in contact with each other. The photoelectricconversion section 7 may be provided in a portion of the first principalsurface 2 p of the light-trapping sheet 51.

By covering the end faces 2 r and 2 s of the light-trapping sheet 51with the reflective film 11, light that has been taken and enclosed inthe light-trapping sheet 51 will circulate in the light-trapping sheet51.

The photoelectric conversion section 7 is a solar cell formed by asilicon. A plurality of photoelectric conversion sections 7 may beattached to one sheet of light-trapping sheet 51. Since the refractiveindex of silicon is about 5, even if light is made incidentperpendicularly on the light-receiving surface of a solar cell, around40% of the incident light is normally lost through reflection withoutbeing taken in the photoelectric conversion section 7. The reflectionloss further increases when the light is incident diagonally. Althoughan AR coat or anti-reflective nanostructures are formed on the surfaceof a commercially-available solar cell in order to reduce the amountreflection, a sufficient level of performance has not been achieved.Moreover, a metal layer is present inside the solar cell, and a largeportion of light that is reflected by the metal layer is radiated to theoutside. With an AR coat or anti-reflective nanostructures, thereflected light is radiated to the outside with a high efficiency.

In contrast, the light-trapping sheet of the present disclosure takes inand encloses light for every visible light wavelength and for everyangle of incidence in the light-trapping sheet. Therefore, with thelight-receiving device 54, light entering through the first principalsurface 2 p of the light-trapping sheet 51 is taken into thelight-trapping sheet 51 and circulates in the light-trapping sheet 51.Since the refractive index of silicon is larger than the refractiveindex of the light-transmitting sheet 2, the out-of-critical-angle light5 b′ and 6 b′ incident on the second principal surface 2 q are nottotally reflected but portions thereof are transmitted into thephotoelectric conversion section 7 as refracted light 5 d′ and 6 d′ andare converted to electric current in the photoelectric conversionsection. After the reflected out-of-critical-angle light 5 c′ and 6 c′propagate inside the photoelectric conversion section 7, they enteragain and are used in photoelectric conversion until all the enclosedlight is gone. Assuming that the refractive index of the transmissivesheet 2 is 1.5, the reflectance of light that is incidentperpendicularly on the first principal surface 2 p is about 4%, but thereflectance can be suppressed to 1 to 2% or less, taking into accountthe wavelength dependency and the angle dependency, if an AR coat oranti-reflective nanostructures are formed on the surface thereof. Lightother than this enters to be confined within the light-trapping sheet51, and is used in photoelectric conversion.

FIGS. 20B and 20C are a cross-sectional view and a plan view,respectively, each showing the position at which the photoelectricconversion section 7 is attached. FIG. 20B is an example where it isarranged at the center of the light-transmitting sheet 2, and FIG. 20Cis an example where it is arranged along the outer edge of thelight-transmitting sheet 2. In the example of FIG. 20B, light 12 a whichhas been taken into the light-transmitting sheet 2 and is propagatingthrough the inside thereof is reflected by the reflective film 11 at theend face 2 s (or 2 r) to become light 12 b propagating through theinside. Depending on the position at which it propagates, a significantdistance is needed to reach the position of the photoelectric conversionsection 7, and there is light that cannot reach the position of thephotoelectric conversion section 7 even after repeatedly reciprocatingbetween the end faces 2 s and 2 r a plurality of times. In contrast, inthe example of FIG. 20C, since the entire outer edge portion is coveredby the photoelectric conversion section 7, all the light 12 propagatingthrough the inside can reliably reach the position of the photoelectricconversion section 7 after one reciprocation. Therefore, for theabsorption loss at the light-transmitting sheet 2 and the reflectionloss at the reflective film 11, FIG. 20C allows the confined light to bemore effectively used in photoelectric conversion.

With the light-receiving device of the present embodiment, most of theincident light can be confined within the sheet, most of which can beused in photoelectric conversion. Therefore, it is possible tosignificantly improve the energy conversion efficiency of thephotoelectric conversion section. The light-receiving area is determinedby the area of a first principal surface p, and all of the lightreceived by this surface enters the photoelectric conversion section 7.Therefore, it is possible to reduce the area of the photoelectricconversion section 7 or reduce the number of photoelectric conversionsections 7, thereby realizing a significant cost reduction of thelight-receiving device.

FIGS. 25A to C each show a cross section and a plan view of theconfiguration according to a variation of the present embodiment.

The example of FIG. 25A has a configuration where a plurality oflight-transmitting sheets 2 are arranged next to one another in thehorizontal direction. In this example, the photoelectric conversionsection 7 is arranged at the edge portion of each light-transmittingsheet. While four light-transmitting sheets 2 are arranged in two rowsand two columns in the example of FIG. 25A, more light-transmittingsheets 2 may be arranged.

In the example of FIG. 25B, a plurality of photoelectric conversionsections 7 are provided on one light-transmitting sheet 2. While twophotoelectric conversion sections 7 are shown in this figure, the numberof photoelectric conversion sections 7 assigned to onelight-transmitting sheet 2 may be three or more. As shown in FIG. 25B, aportion of the photoelectric conversion section 7 does not need to belocated at the outer edge of the principal surface of thelight-transmitting sheet 2.

The example of FIG. 25C uses a light-transmitting sheet 2 whose outlineshape is other than a rectangular shape (e.g., a trapezoidal shape). Theplanar shape of the light-transmitting sheet 2 is not limited to arectangular or square shape, but may be any of a trapezoidal shape, aparallelogram shape and other polygonal shapes. When thelight-transmitting sheet 2 is used by itself, the shape of thelight-transmitting sheet 2 may be any shape. Note however that if aplurality of light-transmitting sheets 2 are arranged two-dimensionallyas shown in FIG. 25A, it will enhance the light efficiency to ensurethat no substantial gap is formed between adjacent light-transmittingsheets 2. Thus, a plurality of light-transmitting sheets 2 may have ashape or shapes such that the light-transmitting sheets 2 can bearranged with no gap therebetween. Note however that it is not necessarythat the plurality of light-transmitting sheets 2 to be arranged allhave the same shape. Note that the example of FIG. 25C includes aphotoelectric conversion section 7 located at the outer edge of theprincipal surface of the light-transmitting sheet 2, and anotherphotoelectric conversion section 7 located in an area other than at theouter edge of the principal surface of the light-transmitting sheet 2.

Fifth Embodiment

Another embodiment of a light-receiving device of the present disclosurewill be described. FIG. 21 schematically shows a cross-sectionalstructure of a light-receiving device 55 of the present embodiment. Thelight-receiving device 55 includes the light-trapping sheet 51 of thefirst embodiment and the photoelectric conversion section 7. Thelight-trapping sheet 52 of the second embodiment or the light-trappingsheet 53 of the third embodiment may be used instead of thelight-trapping sheet 51. Note that the arrangement of the photoelectricconversion section 7 is the same as that of FIG. 20C.

The light-receiving device 55 is different from the light-receivingdevice 54 of the fourth embodiment in that a protrusion/depressionstructure 8 is provided on the second principal surface 2 q, with a gapbetween the protrusion/depression structure 8 and the photoelectricconversion section 7. The protrusion/depression structure 8 provided onthe second principal surface 2 q includes depressed portions andprotruding portions whose width is 0.1 μm or more and which may be in aperiodic pattern or a random pattern. With the protrusion/depressionstructure 8, the out-of-critical-angle light 5 b′ and 6 b′ incident onthe second principal surface 2 q are not totally reflected, and portionsthereof travel toward the photoelectric conversion section 7 as outputlight 5 d′ and 6 d′ to undergo photoelectric conversion. Light that arereflected by the surface of the photoelectric conversion section 7′ aretaken inside through the second principal surface 2 q of thelight-trapping sheet 51 and propagates inside the light-trapping sheet51, after which the light again travel toward the photoelectricconversion section 7 as the output light 5 d′ and 6 d′. Therefore, alsowith the light-receiving device of the present embodiment, most of theincident light can be confined within the light-trapping sheet, most ofwhich can be used in photoelectric conversion. As in the fourthembodiment, it is possible to reduce the area of the photoelectricconversion section 7 or reduce the number of photoelectric conversionsections 7. Therefore, it is possible to realize a light-receivingdevice having a significantly improved energy conversion efficiency andbeing capable of cost reduction.

Sixth Embodiment

Another embodiment of a light-receiving device of the present disclosurewill be described. FIG. 22 schematically shows a cross-sectionalstructure of a light-receiving device 58 of the present embodiment. Thelight-receiving device 58 includes light-trapping sheets 51 and 51′, andthe photoelectric conversion section 7. The first light-trapping sheet51, the light-trapping sheet 52 of the second embodiment or thelight-trapping sheet 53 of the third embodiment may be used instead ofthe light-trapping sheets 51 and 51′. In the present embodiment, thefourth area 2 h may be absent in the light-trapping sheet 51′. Thearrangement of the photoelectric conversion section 7 is the same as thearrangement shown in FIG. 20C, for example.

The light-receiving device 58 is different from the fourth embodiment inthat the attachment is such that the end face 2 s of the light-trappingsheet 51 is in contact with the first principal surface 2 p of thelight-receiving device 54 of the fourth embodiment. The light-trappingsheet 51′ may be attached orthogonal to the light-trapping sheet 51. Inthe light-trapping sheet 51′, the reflective film 11 may be provided onthe end face 2 r, and a reflective film 11′ may be provided on a firstprincipal surface 2 p′ and a second principal surface 2 q′ in thevicinity of the end face 2 s which is attached to the light-trappingsheet 51. The reflective film 11′ serves to reflect the light 6 b so asto prevent the out-of-critical-angle light 6 b from the light-trappingsheet 51 from leaking out of the light-trapping sheet 51′.

The light 4 incident on the first principal surface 2 p of thelight-trapping sheet 51 is taken into the light-trapping sheet 51. Onthe other hand, light 4′ incident on the first principal surface 2 p′and the second principal surface 2 q′ of the light-trapping sheet 51′ istaken into the light-trapping sheet 51′. Light taken into thelight-trapping sheet 51′ becomes guided light 12 propagating toward theend face 2 s, since the end face 2 r is covered by the reflective film11, and merges with the light inside the light-trapping sheet 51. Sincea portion of the second principal surface 2 q in the light-trappingsheet 51 is in contact with the surface of the photoelectric conversionsection 7, and the refractive index of silicon is larger than therefractive index of the light-transmitting sheet 2, theout-of-critical-angle light 5 b′ and 6 b′ incident on the secondprincipal surface 2 q are not totally reflected but portions thereof areincident on the photoelectric conversion section 7 as the refractedlight 5 d′ and 6 d′ and are converted to electric current in thephotoelectric conversion section 7. The reflected out-of-critical-anglelight 5 c′ and 6 c′ propagate inside the light-trapping sheet 51, areincident again on the light-receiving surface of the photoelectricconversion section 7, and are used in photoelectric conversion until theenclosed light is mostly gone.

Since the light-receiving device of the present embodiment includes thelight-trapping sheet 51′ perpendicular to the light-receiving surface ofthe photoelectric conversion section 7, even light that is incidentdiagonally on the first principal surface 2 p of the light-trappingsheet 51 is incident, at an angle close to perpendicular, on the firstprincipal surface 2 p′ and the second principal surface 2 q′ of thelight-trapping sheet 51′. This makes it easier to take in light of everyazimuth.

Therefore, also with the light-receiving device of the presentembodiment, most of the incident light can be confined within thelight-trapping sheet, most of which can be used in photoelectricconversion. As in the fourth embodiment, it is possible to reduce thearea of the photoelectric conversion section 7 or reduce the number ofphotoelectric conversion sections 7. Therefore, it is possible torealize a light-receiving device having significantly improved energyconversion efficiency and being capable of cost reduction.

Sheets of the present disclosure are capable of taking in light over awide area, and over a wide wavelength range (e.g., the entire visiblelight range) for every angle of incidence; therefore, light-receivingdevices using the same are useful as high-conversion-efficiency solarcells, or the like.

While the present invention has been described with respect to preferredembodiments thereof, it will be apparent to those skilled in the artthat the disclosed invention may be modified in numerous ways and mayassume many embodiments other than those specifically described above.Accordingly, it is intended by the appended claims to cover allmodifications of the invention that fall within the true spirit andscope of the invention.

What is claimed is:
 1. A light-receiving device comprising alight-trapping sheet, and a photoelectric conversion section opticallycoupled to the light-trapping sheet, the light-trapping sheetcomprising: a light-transmitting sheet having first and second principalsurfaces; and a plurality of light-coupling structures arranged in aninner portion of the light-transmitting sheet at a first and seconddistance from the first and second principal surfaces, respectively,wherein: each of the plurality of light-coupling structures includes afirst light-transmitting layer, a second light-transmitting layer, and athird light-transmitting layer sandwiched therebetween; a refractiveindex of the first and second light-transmitting layers is smaller thana refractive index of the light-transmitting sheet; a refractive indexof the third light-transmitting layer is larger than the refractiveindex of the first and second light-transmitting layers; and the thirdlight-transmitting layer has a diffraction grating parallel to the firstand second principal surfaces of the light-transmitting sheet; and atleast a part of the photoelectric conversion section is located along anouter edge of at least one of the first and second principal surfaces ofthe light-transmitting sheet, wherein the plurality of light-couplingstructures includes a first light-coupling structure and a secondlight-coupling structure two-dimensionally arranged next to each otheron a surface parallel to the first and second principal surfaces, andthe first and second light-transmitting layers of the firstlight-coupling structure and the first and second light-transmittinglayers of the second light-coupling structure are spaced apart from eachother.
 2. The light-receiving device of claim 1, wherein surfaces of thefirst and second light-transmitting layers that are located opposite tothe third light-transmitting layer are parallel to the first and secondprincipal surfaces of the light-transmitting sheets.
 3. Thelight-receiving device of claim 1, wherein the third light-transmittinglayer of the first light-coupling structure and the thirdlight-transmitting layer of the second light-coupling structure arecontinuous with each other.
 4. The light-receiving device of claim 1,wherein the plurality of light-coupling structures are arrangedthree-dimensionally in an inner portion of the light-transmitting sheetat a first distance or more and a second distance or more from the firstand second principal surfaces, respectively.
 5. The light-receivingdevice of claim 1, further comprising a transparent cover sheet opposingat least one of the first and second principal surfaces of thelight-transmitting sheet with a gap interposed therebetween.
 6. Thelight-receiving device of claim 1, wherein a pitch of the diffractiongrating is 0.1 μm or more and 3 μm or less.
 7. The light-receivingdevice of claim 6, wherein: surfaces of the first and secondlight-transmitting layers are each sized so as to circumscribe a circlehaving a diameter of 100 μm or less; and the plurality of light-couplingstructures each have a thickness of 3 μm or less.
 8. The light-receivingdevice of claim 7, wherein at least two of the plurality oflight-coupling structures are different from each other in terms of adirection in which the diffraction grating extends.
 9. Thelight-receiving device of claim 7, wherein at least two of the pluralityof light-coupling structures are different from each other in terms of apitch of the diffraction grating.
 10. The light-receiving device ofclaim 1, wherein: the light-transmitting sheet includes: a first areabeing in contact with the first principal surface and having a thicknessequal to the first distance; a second area being in contact with thesecond principal surface and having a thickness equal to the seconddistance; a third area sandwiched between the first and second areas;and at least one fourth area provided in the third area and connectingthe first area and the second area to each other; and the plurality oflight-coupling structures are arranged only in the third area excludingthe at least one fourth area; and an arbitrary straight line passingthrough the fourth area is extending along an angle greater than acritical angle, which is defined by the refractive index of thelight-transmitting sheet and a refractive index of an environmentalmedium surrounding the light-transmitting sheet, with respect to athickness direction of the light-transmitting sheet.
 11. Thelight-receiving device of claim 1, wherein in at least one of theplurality of light-coupling structures, thicknesses of the first andsecond light-transmitting layers are decreased toward an outer edge sideaway from a center of the light-coupling structure.
 12. Thelight-receiving device of claim 1, wherein in at least one of theplurality of light-coupling structures, a protrusion/depressionstructure whose pitch and height are ⅓ or less of a design wavelength isformed on one of surfaces of the first and second light-transmittinglayers that are in contact with the light-transmitting sheet, the firstprincipal surface, and the second principal surface.
 13. Thelight-receiving device of claim 1, wherein the refractive index of thefirst and second light-transmitting layers is equal to a refractiveindex of the environmental medium.
 14. The light-receiving device ofclaim 1, further comprising another light-trapping sheet, wherein thephotoelectric conversion section is provided on the first principalsurface of the light-trapping sheet; and an end face of the otherlight-trapping sheet is connected to the second principal surface of thelight-trapping sheet.